Cryogenic probe stations
| Model | Magnet field | Max probe arms | Standard temperature range | Optional high temperature | Optional low temperature | Max sample size | Vacuum | Sample stage rotation | Optional THz probe arm |
| Cryogen-free cryogenic probe stations | |||||||||
| CRX-EM-HF | 0.6 T horizontal field electromagnet | 4 | 8 K to 400 K | — | — | 25 mm (1 in) diameter | 10‑5 Torr | ±360° (optional) | — |
| CRX-VF | 2.5 T vertical field superconducting magnet | 6 | 10 K to 500 K, 10 K to 400 K with load-lock | — | — | 51 mm (2 in) diameter | 10‑5 Torr standard, 10‑7 Torr optional | — |  |
| CRX-4K | — | 6 | 4.5 K to 350 K | 20 K to 675 K | — | 51 mm (2 in) diameter | 10‑5 Torr | — | |
| CRX-6.5K | — | 6 | <10 K to 350 K | 20 K to 675 K | — | 51 mm (2 in) diameter | 10‑5 Torr | — | — |
| Cryogenic probe stations | |||||||||
| FWPX | — | 6 | 4.5 K to 475 K | — | 3.5 K | 102 mm (4 in) diameter | 10‑5 Torr | ±5° | — |
| EMPX-H2 | 0.6 T horizontal field electromagnet | 4 | 4.5 K to 400 K; 8 K to 400 K with 360° rotation option | — | 3.2 K | 25 mm (1 in) diameter | 10‑5 Torr | ±360° (optional) | — |
| CPX-HF | 1 T horizontal field superconducting magnet | 4 | 4.2 K to 400 K | — | 2 K | 25 mm (1 in) diameter | 10‑5 Torr standard, 10‑7 Torr optional | ±5° | — |
| CPX-VF | 2.5 T vertical field superconducting magnet | 6 | 4.2 K to 400 K, <10 K to 400 K with load-lock | — | 2 K | 51 mm (2 in) diameter | 10‑5 Torr standard, 10‑7 Torr optional | ±5° | |
| CPX | — | 6 | 4.2 K to 475 K, <10 K to 400 K with load-lock | 20 K to 675 K cannot be used with load-lock sample assembly | Low temp: 1.9 K very low temp: 1.6 K | 51 mm (2 in) diameter; 12.7 mm (0.5 in) with load-lock | 10‑5 Torr standard, 10‑7 Torr optional | ±5° | |
| TTPX | — | 6 | 4.2 K to 475 K | 20 K to 675 K | 3.2 K | 51 mm (2 in) diameter | 10‑5 Torr | — | — |
| PS-100 | — | 4* | 4.2 K to 475 K | 20 K to 675 K | 3.2 K | 32 mm (1.25 in) diameter* | 10‑5 Torr | — | — |
*As currently configured. The PS-100 can be field upgraded to six probe arms and support larger sample sizes by selecting optional equipment from the TTPX probe station family. | |||||||||
Features of the Model PS-100 tabletop probe station
- Fully specified, preconfigured entry-level system
- Compact table-top design with four-arm triaxial configuration
- Affordable, simple to order, rapidly shipped
- Just add cryogen and vacuum pump
- Can be field upgraded for other TTPX capabilities
Features of the Model TTPX Tabletop Probe Station
- Entry-level system
- Compact table-top design
- Affordable
- Rapid cooldown and warmup
- Backside optical access
Features of the Model CPX High Performance Probe Station
- Lake Shore’s most versatile probe station
- Numerous options and configurations available
- Multiple radiation shields for best low temperature performance
- Minimize sample condensation during cool-down
- Customizable for sample transfer with no exposure to atmosphere
- Customizable to accommodate a 4 in wafer
- THz probe arm option for precise on-wafer contact probing of millimeter wave devices at THz frequencies (75 GHz and up)
Features of the Model CPX-HF Superconducting Magnet-based Horizontal Field Probe Station
- Standard probing plus in-plane horizontal field superconducting magnetic measurements
- Multiple radiation shields for best low temperature performance
- Minimize sample condensation during cool-down
- True 90° probing
Features of the Model CPX-VF Superconducting Magnet-based Vertical Field Probe Station
- Standard probing plus out-of-plane vertical field superconducting magnetic measurements
- Multiple radiation shields for best low temperature performance
- Minimize sample condensation during cool-down
- True 90° probing
- Customizable for Hall measurements
- Customizable up to 3 T with specialized probes
- THz probe arm option for precise on-wafer contact probing of millimeter wave devices at THz frequencies (75 GHz and up)
Features of the Model EMPX-H2 Electromagnet-based Horizontal Field Probe Station
- Standard probing plus in-plane horizontal field electromagnetic measurements
- Generate full field without cryogen or cooldown
- Probes configured at 30° angles to accommodate electromagnet
Features of the Model FWPX Large-size wafer probe station
- Largest wafer sample size: 4 in
- Sample translation for rapid probing
- Customizable to accept 6 in wafers
Features of the Model CRX-4K High Performance Closed Cycle Refrigerator-based Probe Station
- Cryogen-free operation
- Allows unsupervised cool down
- Low temperature operation
- Minimize sample condensation during cooldown
- Customizable to accommodate a 102 mm (4 in) wafer
- THz probe arm option for precise on-wafer contact probing of millimeter wave devices at THz frequencies (75 GHz and up)
Features of the Model CRX-6.5K Affordable Cryogen-free Probe Station
- Cryogen-free operation
- Push-button operation and allows unsupervised cooldown
- Affordability
Features of the Model CRX-EM-HF Cryogen-free Horizontal Field Electromagnet Probe Station
- Cryogen-free operation
- Allows unsupervised cool down
- Standard probing plus in-plane horizontal field electromagnetic measurements
- Generate full field without cooldown
- Probes configured at 30° angles to accommodate electromagnet
- Optional 360° rotation
Features of the Model CRX-VF Cryogen-free Vertical Field Superconducting Magnet Probe Station
- Cryogen-free operation
- Allows unsupervised cooldown
- Standard probing plus out-of-plane vertical field superconducting magnetic measurements
- True 90° probing
- Customizable up to 3 T with specialized probes
- Customizable to make Hall measurements
- THz probe arm option for precise on-wafer contact probing of millimeter wave devices at THz frequencies (75 GHz and up)
Lake Shore and Cascade Microtech are collaborating to deliver a complete range of measurement solutions all along the spectrum from cryogenic/magnetic materials science to automated probing of production-ready devices.
Take advantage of our combined best-of-breed probe system technology and application know-how.
Probe station features by model
Lake Shore’s probe station family features many configuration options to cover the requirements of a broad range of applications. Use the table below to identify any specific features needed and the probe station models that best meet these needs.
