Micro-manipulated Probe Systems
Micro-manipulated cryogenic and vacuum probe systems for chips, wafers, and device testing from ~3.5 K to 675 K
Janis micro-manipulated probe stations are designed for non-destructive electrical testing using DC, RF, and fiber-optic probes. They are useful in a variety of fields including semiconductors, MEMS, superconductivity, electronics, ferroelectrics, material science, physics, and optics. Either LHe/LN2 or a mechanical closed-cycle refrigerator provides cooling. Different models locate the sample in ultra-high vacuum (UHV), ultra-high temperature (to 675 K), and magnetic field.
Flexible probe tips
Janis Research's new technique of cryogenic probe station special flexible probe tips allows absorbing the probe arm thermal drift movement during variable DUT temperature measurements.
Miniature, transportable sample vacuum chamber
Janis Research also offers a miniature, transportable sample vacuum chamber capable of maintaining a sample in vacuum during transportation via an atmosphere environment. The vacuum chamber can be used for transferring wafer/substrates under vacuum from a glove box with a special environment into a vacuum or cryogenic micro-manipulated probe station (or into a vacuum chamber) and back into the glove box after testing, measurements, or preparations. This transportable vacuum chamber protects the wafer/substrates from atmospheric contamination both on loading and unloading.
Unlike a common vacuum load-lock, the vacuum chamber has the following features and benefits:
- Typical sizes of 50 mm diameter and 25 mm thickness
- No gate valves required
- Very convenient and easy operation
- Low cost
- Mount the transportable sample mount without increasing base temperature of the cryogenic probe station
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- Less than 1 µm vibration
- Temperature range (with 4 probe arms installed) from 4.5 K to 350 K (optional: 6.5 K to 475 K or 6.5 K to 675 K)
- Accommodates up to 2 in (51 mm) diameter wafers (optional: up to 8 in [200 mm]) (see specifications chart for more details)
- Up to eight cooled, easily interchangeable, micro-manipulated probe arms
- Electrical measurements from DC to 67 GHz
- Wide variety of inexpensive LF probe tips that are easy to replace
- Very low triaxial probe arms leakage current (typically 1 to 2 fA at 1 V)
- Non-contact, non-destructive Kelvin probes
- Multi-tip probes
- Fiber probe arms with single and multi-mode fiber options
- Additional electrical feedthroughs with cables and wires to sample area
- Optional special miniature vacuum chamber to transfer sample under vacuum from glove box to probe station
- Precise translation x-y-z travel stages for all monoscope system assemblies
- Optional movable sample holder
- System customization options
- Low vibration level and the positional drift
- Temperature range from ~3.5 K to 475 K (optional: 8 K to 650 K) (depending on probes)
- Works either with liquid nitrogen or liquid helium
- Helium consumption less than 1 L/h
- Accommodates up to 2 in (51 mm) diameter wafers (optional: up to 8 in [203 mm])
- Up to seven cooled, easily interchangeable, micro-manipulated probe arms
- Electrical measurements from DC to 67 GHz
- Wide variety of inexpensive LF probe tips that are easy to replace
- Very low triaxial probe arms leakage current of just a few fA
- Non-contact, non-destructive Kelvin probes
- Multi-tip probes
- Fiber probe arms with single and multi-mode fiber options
- Optional optical access through the sample mount for transmission measurements
- Additional electrical feedthroughs with cables and wires to sample area
- Optional special miniature vacuum chamber to transfer sample under vacuum from glove box to probe station
- Very smooth x-y-z travel stages for all monoscope system assemblies
- Optional movable sample holder
- System customization options
- Looking for a cryogen-free option for your existing "wet" probe station? Optional recirculating gas cooler eliminates the use of liquid helium for "wet" systems.
Probe station specification overview
| Model | Cooling method | Temperature range with 4 probe arms | Magnetic field | Vacuum | Number of probes | Max sample size | Vibration level |
| ST-500 | LHe/LN2 | ~3.5 K to 475 K (8 K to 675 K optional) | N/A | 10-5 to 10-6 mbar (10-6 to 10-9 mbar optional) | 2 to 6 (8 optional) | 50 mm (200 mm optional) | 25 nm |
| ST-500-EM (electromagnet) | LHe/LN2 | ~3.5 K to 475 K (8 K to 675 K optional) | 0.6 T horizontal | — | 4 | 50 mm | 25 nm |
| ST-SCON (superconducting magnet) | LHe/LN2 | 5 K to 420 K | 3 T vertical Vector: | 10-5 to 10-6 mbar | 2 to 6 | 50 mm | <1 µm |
| ST-500-PM (permanent magnet) | LHe/LN2 | up to 350 K (up to 475 K optional) | 0.6 T horizontal 0.2 T vertical | — | 4 (horizontal) | 50 mm | — |
| ST-500-UHV | LHe/LN2 | Contact Janis | — | 10-7 to 10-8 mbar | Contact Janis | 50 mm | — |
| ST-100-MC (mobile sample holder) | LHe/LN2 | Contact Janis | — | 10-5 to 10-6 mbar (10-6 to 10-9 mbar optional) | Contact Janis | 50 mm (200 mm optional) | — |
| ST-500-MC (mobile sample holder) | LHe/LN2 | Contact Janis | — | — | Contact Janis | 50 mm | — |
| CCR-4 | Closed-cycle refrigerator (cryogen-free) | 4.5 K to 350 K (6.5 K to 475 K or 675 K optional) | — | — | 2 to 6 | 50 mm | <1 µm |
| CCR-10 | Closed-cycle refrigerator (cryogen-free) | 9 K to 350 K (11 K to 475 K or 675 K optional) | — | — | 2 to 6 | 50 mm | <1 µm |
| CCR-80 | Closed-cycle refrigerator (cryogen-free) | ~80 K to 350 K | — | — | 2 to 6 | 50 mm | <1 µm |
| CCR-EM (electromagnet) | Closed-cycle refrigerator (cryogen-free) | 10 K to 350 K (12 K to 675 K optional) | 0.6 T horizontal | — | 4 | 50 mm | <1 µm |
| CCR-SCON (superconducting magnet) | Closed-cycle refrigerator (cryogen-free) | 5 K to 300 K | 3 T vertical | 10-5 to 10-6 mbar | 2 to 6 | 50 mm | <1 µm |
| RT-500 (room temperature) | N/A | 300 K to 500 K (300 K to 675 K optional) | — | — | 2 to 6 | 50 mm | — |
Temperature range varies depending on probe type. Specifications subject to change without notice.