M91 Specifications

Measurement performance

   Voltage measurement range
   1 mV10 mV100 mV1 V10 V
Current excitation range1 µAFull-scale resistance1 kΩ10 kΩ100 kΩ1 MΩ10 MΩ
Accuracy (1 year) calibration temperature °C ± 5 °C ± % reading10.2%0.06%0.06%****
Temperature coefficient/°C 10 °C to 35 °C ≤ 65% RH non-condensing ± % reading (typical)0.001%0.001%0.001%****
10 µAFull-scale resistance100 Ω1 kΩ10 kΩ100 kΩ1 MΩ
Accuracy (1 year) calibration temperature °C ± 5 °C ± % reading10.2%0.06%0.06%0.06%**
Temperature coefficient/°C 10 °C to 35 °C ≤ 65% RH non-condensing ± % reading (typical)0.001%0.001%0.001%0.001%**
100 µAFull scale resistance10 Ω100 Ω1 kΩ10 kΩ100 kΩ
Accuracy (1 year) calibration temperature °C ± 5 °C ± % reading10.2%0.2%0.06%0.06%0.06%
Temperature coefficient/°C 10 °C to 35 °C ≤ 65% RH non-condensing ± % reading (typical)0.001%0.001%0.001%0.001%0.5%
1 mAFull scale resistance1 Ω10 Ω100 Ω1 kΩ10 kΩ
Accuracy (1 year) calibration temperature °C ± 5 °C ± % reading10.2%0.2%0.2%0.06%0.06%
Temperature coefficient/°C 10 °C to 35 °C ≤ 65% RH non-condensing ± % reading (typical)0.001%0.001%0.001%0.001%0.5%
10 mAFull scale resistance0.1 Ω1 Ω10 Ω100 Ω1 kΩ
Accuracy (1 year) calibration temperature °C ± 5 °C ± % reading10.5%0.2%0.2%0.2%0.2%
Temperature coefficient/°C 10 °C to 35 °C ≤ 65% RH non-condensing ± % reading (typical)0.001%0.001%0.001%0.001%0.5%
100 mAFull scale resistance0.01 Ω0.1 Ω1 Ω10 Ω100 Ω
Accuracy (1 year) calibration temperature °C ± 5 °C ± % reading1,22.0%0.2%0.2%0.2%**
Temperature coefficient/°C 10 °C to 35 °C ≤ 65% RH non-condensing ± % reading (typical)0.001%0.001%0.001%0.001%**

** Range available, not specified
1Calibration temperature is the ambient temperature during factor calibration; typically, 23 °C; reported by the instrument.
2Guaranteed when lead resistance is 0.1 Ω or less
All accuracies based on current reversal measurements.



   Current measurement range
   1 nA100 µA10 mA100 mA
Voltage excitation range10 mVFull-scale resistance1 MΩ1 kΩ1 Ω0.1 Ω
Accuracy (1 year) calibration temperature °C ± 5 °C ± % reading10.5%******
Temperature coefficient/°C 10 °C to 35 °C ≤ 65% RH non-condensing ± % reading (typical)0.001%******
100 mVFull-scale resistance10 MΩ10 kΩ10 Ω1 Ω
Accuracy (1 year) calibration temperature °C ± 5 °C ± % reading10.5%******
Temperature coefficient/°C 10 °C to 35 °C ≤ 65% RH non-condensing ± % reading (typical)0.001%******
1 VFull-scale resistance100 MΩ100 kΩ100 Ω10 Ω
Accuracy (1 year) calibration temperature °C ± 5 °C ± % reading10.8%0.5%****
Temperature coefficient/°C 10 °C to 35 °C ≤ 65% RH non-condensing ± % reading (typical)0.001%0.001%****
10 VFull-scale resistance1 GΩ1 MΩ1 kΩ100 Ω
Accuracy (1 year) calibration temperature °C ± 5 °C ± % reading10.5%0.5%****
Temperature coefficient/°C 10 °C to 35 °C ≤ 65% RH non-condensing ± % reading (typical)0.001%0.001%****

** Range available, not specified
1Calibration temperature is the ambient temperature during factor calibration; typically, 23 °C; reported by the instrument. All accuracies based on current reversal measurements.



Current measurement rangeDC Accuracy (1 year) calibration temperature °C ± 5 °C ± % reading1
10 mA0.3%
100 mA0.3%

1 Calibration temperature is the ambient temperature during factor calibration; typically, 23 °C; reported by the instrument. All accuracies based on current reversal measurements.



Voltage and current excitation specifications

Voltage excitation rangeProgramming resolution (0.001%)Temperature coefficient/°C 10 °C to 35 °C ± (% setting + offset), typical
10 mV100 nV0.06% + 4 µV
100 mV1 µV0.005% + 4 µV
1 V10 µV0.0004% + 20 µV
10 V100 µV0.0004% + 200 µV
Current excitation rangeProgramming resolution (0.001%)Temperature coefficient/°C 10 °C to 35 °C ± (% setting + offset), typical
1 µA10 pA0.002% + 9 pA
10 µA100 pA0.0004% + 20 pA
100 µA1 nA0.0004% + 90 pA
1 mA10 nA0.0004% + 40 pA
10 mA100 nA0.0004% + 4 nA
100 mA1 µA0.0004% + 40 nA


Voltage and current measurement specifications

Voltage measurement rangeTemperature coefficient/°C 10 °C to 35 °C ± (% setting + offset), typical
1 mV50 nV
10 mV50 nV
100 mV200 nV
1 V2 µV
10 V20 µV
Current measurement rangeTemperature coefficient/°C 10 °C to 35 °C ± (% setting + offset), typical
10 nA2 pA
10 µA7 pA
10 mA7 nA
100 mA70 nA


Hall measurement

FastHall™ method (no physical field reversal) — van der Pauw samples
Traditional method — Hall bar and van der Pauw samples

Derived parameters

Hall coefficient, Hall mobility, resistivity, carrier concentration

Resistivity range

M91 resistance range 10 mΩ to 10 MΩ
M91 with M9-ADD-HR (high resistance option) resistance range 10 mΩ to 200 GΩ

Hall mobility range

0.001 to 106 cm2/V s

Programmable limits

I out: compliance voltage; V out: current limit
      Positive output: ±5% of setting (when setting is >10% of its full-scale range)
      Negative output: ±5% of setting (when setting is >10% of its full-scale range)
Programming resolution current limit: 0.1% of full-scale current range (auto selected)
Programming resolution voltage limit: 10 mV

Analog input

Analog input raw signal accuracy: ±300 mV of reading
Raw analog input voltage range: ±11 V
Safe input voltage range: ±15 V

Analog output

Analog output raw signal accuracy: ±300 mV of setting
Raw analog output voltage range: ±11 V rails, ±15 V max during overload

Digital input

Number of independent inputs: 4
Input isolation: Optical
Maximum low-level input voltage: 1 V
Minimum high-level input voltage: 4 V
Safe input voltage range: -5 V to 32 V

Digital output

Number of independent outputs: 4
Relay type: Solid state
Digital output relay max current: 1.5 A
Digital output relay max voltage: 32 V

Rear panel test connectors

Sample connections: 6 individual 3-lug socket triaxial connectors
Analog input BNC
Analog output BNC
10-pin Phoenix connector for digital output
10-pin Phoenix connector for digital input
2-pin Phoenix connector for ground 1

Front panel

Display: 5 in capacitive touch, color TFT-LCD WVGA (800 × 480) with LED backlight

Interface

USB host
      Type: USB 3.0, mass storage class (MSC) device
      Function: Firmware updates, flash drive support
      Location: Rear panel
      Connector: USB Type-C™

USB device
      Type: USB 2.0
      Function: Emulates a standard RS-232 serial port
      Protocol: Standard commands for programmable instruments (SCPI)
      Baud rate: 115,200
      Connector: USB Type-B
      Software support: LabVIEW™ and IVI.NET drivers (coming soon)

Ethernet
      Function: TCP/IP command and control, mobile app
      Application layer protocol: Standard commands for programmable instruments (SCPI)
      Connector: RJ-45
      Speed: 1 Gb/s
      Software support: LabVIEW™ and IVI.NET drivers (coming soon)

General

Operating conditions: 23 °C ±5 °C at rated accuracy; 10 °C to 35 °C at reduced accuracy, <70% RH non-condensing

Instrument maximum field exposure: Operational limit <10 mT DC, 1 mT RMS; Guaranteed performance <2 mT RMS

Power requirement: 100 V to 240 V (universal input), 50 to 60 Hz, 30 VA

Size: 216 mm W × 87 mm H × 369 mm D (8.5 in × 3.4 in × 14.5 in), half rack

Weight: 6.4 kg (14 lb)

Approval: CE mark

Warm-up time: 30 min

Power consumption: 35 W maximum

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